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CORC

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Design of a Graphene Capacitive Pressure Sensor for Ultra-low Pressure Detection 其他
2016-01-01
Zhang, Yangxi; Gui, Yiming; Meng, Fanrui; Gao, Chengchen; Hao, Yilong
收藏  |  浏览/下载：5/0  |  提交时间：2017/12/03
Highly sensitive seesaw capacitive pressure sensor based on SOI wafer 期刊论文
electronics letters, 2014
Yang, C. C.; Zhao, Q.; Gao, C. C.; Liu, G. D.; Zhang, Y. X.; Cui, W. P.; Hao, Y. L.
收藏  |  浏览/下载：2/0  |  提交时间：2015/11/13
Silicon Carbide Capacitive Pressure Sensors with arrayed sensing membranes 其他
2013-01-01
Meng, Bo; Tang, Wei; Peng, Xuhua; Zhang, Haixia
收藏  |  浏览/下载：1/0  |  提交时间：2015/11/13
An optimized fabrication of high yield CMOS-compatible silicon carbide capacitive pressure sensors 其他
2012-01-01
Meng, B.; Tang, W.; Wang, Z.R.; Zhang, H.X.
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/13
Complementary metal-oxide semiconductor-compatible silicon carbide pressure sensors based on bulk micromachining 期刊论文
micro nano letters, 2011
Tang, Wei; Zheng, Baixiang; Liu, Lei; Chen, Zhe; Zhang, Haixia
收藏  |  浏览/下载：5/0  |  提交时间：2015/11/13
A continuous-time voltage readout for SiC micromechanical capacitive pressure sensor 其他
2010-01-01
Zheng, Baixiang; Tang, Wei; Che, Zhe; Zhang, Haixia
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/13
Study of Polyimide as Sacrificial Layer with O(2) Plasma Releasing for Its Application in MEMS Capacitive FPA Fabrication 其他
2009-01-01
Ma, Shenglin; Li, Ying; Sun, Xin; Yu, Xiaomei; Jin, Yufeng
收藏  |  浏览/下载：5/0  |  提交时间：2015/11/16
FABRICATION OF SiC MEMS PRESSURE SENSOR BY ANODIC BONDING 其他
2008-01-01
Tang, Wei; Chen, Zhe; Tian, Dayu; Zhang, Haixia
收藏  |  浏览/下载：7/0  |  提交时间：2015/11/13

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