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	Design of a Graphene Capacitive Pressure Sensor for Ultra-low Pressure Detection
	Zhang, Yangxi ; Gui, Yiming ; Meng, Fanrui ; Gao, Chengchen ; Hao, Yilong
	2016
关键词	graphene capacitive sensor ultra-low pressure
英文摘要	This paper reports the design and theoretical calculation of a capacitive ultra-low pressure sensor, which is based on circular suspend graphene diaphragm array. The atom scale thickness and high mechanical strength of suspend graphene diaphragm both contribute to ultra-low pressure measure range. As the size of single suspend graphene diaphragm is limited by fabrication process, a parallel connected sensor array is designed to achieve detectable capacitance change and redundancy. In calculation, a sensor array with 40,000 5 mu m radius suspend graphene diaphragm cells in 4mmx4mm size can provide 288fF/Pa sensitivity to pressure load.; CPCI-S(ISTP); gaocc@pku.edu.cn
语种	英语
出处	11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/459759]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Zhang, Yangxi,Gui, Yiming,Meng, Fanrui,et al. Design of a Graphene Capacitive Pressure Sensor for Ultra-low Pressure Detection. 2016-01-01.

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