Extraction of material parameters of a bi-layer structure using Terahertz time-domain spectroscopy

CORC > 紫金山天文台 > 中国科学院紫金山天文台 > 毫米波和亚毫米波技术实验室

	Extraction of material parameters of a bi-layer structure using Terahertz time-domain spectroscopy
	Jin BiaoBing 1; Zhang CaiHong 1; Shen XiaoFang 2,3; Ma JinLong 1; Chen Jian 1; Shi ShengCai2 ; Wu PeiHeng 1
刊名	SCIENCE CHINA-INFORMATION SCIENCES
	2014-08-01
卷号	57 期号:8 页码:0
关键词	material parameter Terahertz spectrum extraction method anti-reflection coating layer THz-time-domain spectroscopy
ISSN号	1674-733X
英文摘要	For a bi-layer structure consisting of a film deposited on a substrate, a new extraction method is proposed using which we can extract both the material parameters of the film and the thickness of the substrate from the measured Terahertz transmission through it, so long as the complex refractive index of the substrate is known beforehand. This method is applicable to a range of refractive indices of the film less than the refractive index of the substrate and a very wide range of layer thicknesses from 20 mu m to at least 200 mu m. It is very useful in some cases where the thickness of the substrate cannot be determined using conventional methods such as a Vernier caliper or micrometer screw.
WOS标题词	Science & Technology ; Technology
类目[WOS]	Computer Science, Information Systems
研究领域[WOS]	Computer Science
关键词[WOS]	SUPERCONDUCTING THIN-FILMS ; SILICON ; CONDUCTIVITY ; TECHNOLOGY ; THICKNESS ; LAYERS
收录类别	SCI
原文出处	10.1007/s11432-014-5136-2
语种	英语
WOS记录号	WOS:000339365500022
公开日期	2014-11-20
内容类型	期刊论文
源URL	[http://libir.pmo.ac.cn/handle/332002/10578]
专题	紫金山天文台_毫米波和亚毫米波技术实验室
作者单位	1.Nanjing Univ, RISE, Sch Elect Sci & Engn, Nanjing 210093, Jiangsu, Peoples R China 2.Chinese Acad Sci, Purple Mt Observ, Nanjing 210008, Peoples R China 3.Chinese Acad Sci, Grad Sch, Beijing 100086, Peoples R China
推荐引用方式 GB/T 7714	Jin BiaoBing,Zhang CaiHong,Shen XiaoFang,et al. Extraction of material parameters of a bi-layer structure using Terahertz time-domain spectroscopy[J]. SCIENCE CHINA-INFORMATION SCIENCES,2014,57(8):0.
APA	Jin BiaoBing.,Zhang CaiHong.,Shen XiaoFang.,Ma JinLong.,Chen Jian.,...&Wu PeiHeng.(2014).Extraction of material parameters of a bi-layer structure using Terahertz time-domain spectroscopy.SCIENCE CHINA-INFORMATION SCIENCES,57(8),0.
MLA	Jin BiaoBing,et al."Extraction of material parameters of a bi-layer structure using Terahertz time-domain spectroscopy".SCIENCE CHINA-INFORMATION SCIENCES 57.8(2014):0.