Deposition of DLC film on the inner surface of N80 pipeline by hollow cathode PECVD

	Deposition of DLC film on the inner surface of N80 pipeline by hollow cathode PECVD
	Zhengyu Liu; Chenglong Mou; Pingmei Yin; Xueqian Cao; Guangan Zhang; Qunji Xue
刊名	Surface Science and Technology
	2023-10-19
期号	1 页码:12
内容类型	期刊论文
源URL	[http://ir.licp.cn/handle/362003/30620]
专题	兰州化学物理研究所_固体润滑国家重点实验室
通讯作者	Xueqian Cao; Guangan Zhang
推荐引用方式 GB/T 7714	Zhengyu Liu,Chenglong Mou,Pingmei Yin,et al. Deposition of DLC film on the inner surface of N80 pipeline by hollow cathode PECVD[J]. Surface Science and Technology,2023(1):12.
APA	Zhengyu Liu,Chenglong Mou,Pingmei Yin,Xueqian Cao,Guangan Zhang,&Qunji Xue.(2023).Deposition of DLC film on the inner surface of N80 pipeline by hollow cathode PECVD.Surface Science and Technology(1),12.
MLA	Zhengyu Liu,et al."Deposition of DLC film on the inner surface of N80 pipeline by hollow cathode PECVD".Surface Science and Technology .1(2023):12.