A study on the epitaxial structure and characteristics of high-efficiency blue silicon photodetectors

doi:10.37188/CO.2021-0188

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	A study on the epitaxial structure and characteristics of high-efficiency blue silicon photodetectors
	W.-S. Chen; H.-B. Wang; J. Tao; D. Gao; J.-G. Lv; Y.-X. Qin; G.-T. Guo; X.-L. Li; Q. Wang; J. Zhang
刊名	Chinese Optics
	2022
卷号	15 期号:3 页码:568-591
ISSN号	20971842
DOI	10.37188/CO.2021-0188
英文摘要	In order to achieve high spectral responsivity of the silicon avalanche photodiode in blue band (400500 nm), Separated Absorption Control Multiplication (SACM) basic device structure was designed. Based on multiple physical models, the effect of the thickness on the avalanche breakdown voltage and the photocurrent gain of the device and the effect of the doping concentration of the multiplication layer on the optical responsivity were investigated. Comprehensively considering the factors of light responsivity and breakdown voltage, the results show that the device has a low breakdown voltageVbr-apd=34.2 V when the doping concentration of the surface non-depleted layer is 1.01018 cm3, and the thickness is 0.03 m; the doping concentration of absorption layer is 1.01015 cm3, the thickness is 1.3 m, the doping concentration of field control layer is 8.01016 cm3, the thickness is 0.2 m and the doping concentration of double layer is 1.81016 cm3 and the thickness is 0.5 m. When Vapd=0.95Vbr-apd, it has higher optical responsivity in blue band, i.e. SR is 3.72~6.08 AW1. The above research results provide certain theoretical reference for the preparation of practical Si-APD devices with high blue light detection responsivity. Copyright 2022 Chinese Optics. All rights reserved.
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内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/67124]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	W.-S. Chen,H.-B. Wang,J. Tao,et al. A study on the epitaxial structure and characteristics of high-efficiency blue silicon photodetectors[J]. Chinese Optics,2022,15(3):568-591.
APA	W.-S. Chen.,H.-B. Wang.,J. Tao.,D. Gao.,J.-G. Lv.,...&J.-Q. Liang and W.-B. Wang.(2022).A study on the epitaxial structure and characteristics of high-efficiency blue silicon photodetectors.Chinese Optics,15(3),568-591.
MLA	W.-S. Chen,et al."A study on the epitaxial structure and characteristics of high-efficiency blue silicon photodetectors".Chinese Optics 15.3(2022):568-591.