A Novel Self-Correction Method for Linear Displacement Measurement Based on 2-D Synthesis Mechanism

doi:10.1109/tim.2022.3216061

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	A Novel Self-Correction Method for Linear Displacement Measurement Based on 2-D Synthesis Mechanism
	H. Yu; Q. H. Wan and C. H. Zhao
刊名	Ieee Transactions on Instrumentation and Measurement
	2022
卷号	71 页码:8
ISSN号	0018-9456
DOI	10.1109/tim.2022.3216061
英文摘要	With increased range, the accuracy of longer-range linear displacement measurement is difficult to guarantee. According to the analysis, it is inevitable that there will be a certain margin between the direction of the calibration grating and the direction of the reading head, which will impact the longer-range linear displacement measurement. In order to eliminate this measurement error, a self-correction method based on 2-D synthesis is herein proposed. First, we describe the principle of absolute linear displacement measurement based on image recognition. Then, the error model is established, which caused by the included angle between the calibration grating and the reading head. Third, a method is proposed for obtaining the vertical offset of the calibration grating by using the vertical image sensor. Finally, we reach an error self-correction method based on 2-D synthesis. In order to test the feasibility of the proposed method, a linear displacement measuring device with a range of 200 mm was developed. After experiment, the maximum absolute error was reduced from 4.34 to 2.03 mu m with the proposed error correction in the long range of 200 mm. The proposed algorithm does not depend on the assembly and installation position, and can realize self-correction of errors. So the method could lay the groundwork for improving larger range linear displacement measurement technology.
URL标识	查看原文
语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/66917]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	H. Yu,Q. H. Wan and C. H. Zhao. A Novel Self-Correction Method for Linear Displacement Measurement Based on 2-D Synthesis Mechanism[J]. Ieee Transactions on Instrumentation and Measurement,2022,71:8.
APA	H. Yu,&Q. H. Wan and C. H. Zhao.(2022).A Novel Self-Correction Method for Linear Displacement Measurement Based on 2-D Synthesis Mechanism.Ieee Transactions on Instrumentation and Measurement,71,8.
MLA	H. Yu,et al."A Novel Self-Correction Method for Linear Displacement Measurement Based on 2-D Synthesis Mechanism".Ieee Transactions on Instrumentation and Measurement 71(2022):8.