Application of Laser Treatment in MOS-TFT Active Layer Prepared by Solution Method

	Application of Laser Treatment in MOS-TFT Active Layer Prepared by Solution Method
	Chen, Nanhong; Ning, Honglong; Liang, Zhihao; Liu, Xianzhe; Wang, Xiaofeng; Yao, Rihui; Zhong, Jinyao; Fu, Xiao; Qiu, Tian; Peng, Junbiao
刊名	MICROMACHINES
	2021
卷号	12 期号:12 页码:1496
公开日期	2021
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/30737]
专题	半导体研究所_中科院半导体照明研发中心
推荐引用方式 GB/T 7714	Chen, Nanhong; Ning, Honglong; Liang, Zhihao; Liu, Xianzhe; Wang, Xiaofeng; Yao, Rihui; Zhong, Jinyao; Fu, Xiao; Qiu, Tian; Peng, Junbiao. Application of Laser Treatment in MOS-TFT Active Layer Prepared by Solution Method[J]. MICROMACHINES,2021,12(12):1496.
APA	Chen, Nanhong; Ning, Honglong; Liang, Zhihao; Liu, Xianzhe; Wang, Xiaofeng; Yao, Rihui; Zhong, Jinyao; Fu, Xiao; Qiu, Tian; Peng, Junbiao.(2021).Application of Laser Treatment in MOS-TFT Active Layer Prepared by Solution Method.MICROMACHINES,12(12),1496.
MLA	Chen, Nanhong; Ning, Honglong; Liang, Zhihao; Liu, Xianzhe; Wang, Xiaofeng; Yao, Rihui; Zhong, Jinyao; Fu, Xiao; Qiu, Tian; Peng, Junbiao."Application of Laser Treatment in MOS-TFT Active Layer Prepared by Solution Method".MICROMACHINES 12.12(2021):1496.