| Batch Fabrication of Wear-Resistant and Conductive Probe with PtSi Tip | |
| Liu, Meijie; Zhu, Yinfang; Zhao, Junyuan; Wang, Lihao; Yang, Jinling; Yang, Fuhua | |
| 刊名 | MICROMACHINES
 |
| 2021 | |
| 卷号 | 12期号:11页码:1326 |
| 公开日期 | 2021 |
| 内容类型 | 期刊论文 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/30838]  |
| 专题 | 半导体研究所_半导体集成技术工程研究中心 |
| 推荐引用方式 GB/T 7714 | Liu, Meijie; Zhu, Yinfang; Zhao, Junyuan; Wang, Lihao; Yang, Jinling; Yang, Fuhua. Batch Fabrication of Wear-Resistant and Conductive Probe with PtSi Tip[J]. MICROMACHINES,2021,12(11):1326. |
| APA | Liu, Meijie; Zhu, Yinfang; Zhao, Junyuan; Wang, Lihao; Yang, Jinling; Yang, Fuhua.(2021).Batch Fabrication of Wear-Resistant and Conductive Probe with PtSi Tip.MICROMACHINES,12(11),1326. |
| MLA | Liu, Meijie; Zhu, Yinfang; Zhao, Junyuan; Wang, Lihao; Yang, Jinling; Yang, Fuhua."Batch Fabrication of Wear-Resistant and Conductive Probe with PtSi Tip".MICROMACHINES 12.11(2021):1326. |
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