Linear off null working condition for total internal reflection imaging ellipsometry to detect subtle electron density change

	Linear off null working condition for total internal reflection imaging ellipsometry to detect subtle electron density change
	Jin X ; Wang C ; Shen J ; Liu W(刘巍); Luo ZR(罗子人); Niu Y(牛宇)
	2021
会议日期	24 April 2021 到 26 April 2021
会议地点	Hangzhou
关键词	Electron density TIRIE Working conditions
页码	117811I
英文摘要	Total internal reflection imaging ellipsometry (TIRIE) is widely used in the field of the biological detection due to its high sensitivity and multi-detection capability. Traditionally, the ellipsometric measurement works under the null-off null condition which is insensitive to the small interface variations such as the electron density disturbance at the sensing surface. Thus, we analyze the response of the detected signals under the different working conditions to the ellipsometric parameter variations and optimize the polarization settings to further enhance the TIRIE response to the subtle interface variation in this paper. Furthermore, the relationship between the detected signal and the electron density disturbance is obtained, and the result shows that the detection sensitivity for the subtle interface changes is improved by one hundred times under the optimized working condition. © SPIE. Downloading of the abstract is permitted for personal use only.
会议录	Proceedings of SPIE - The International Society for Optical Engineering
语种	英语
URL标识	查看原文
内容类型	会议论文
源URL	[http://dspace.imech.ac.cn/handle/311007/87802]
专题	力学研究所_国家微重力实验室
作者单位	1.Center for Gravitational Wave Experiment, Institute of Mechanics, Chinese Academy of Science, 15 Bei-si-huan West Road, Beijing, 100190, China 2.School of Engineering Science, University of Chinese Academy of Science, 19 Yu-quan Road, Beijing, 100049, China 3.NML, Beijing Key Laboratory of Engineered Construction and Mechanobiology, Institute of Mechanics, Chinese Academy of Sciences, 15 Bei-si-huan West Road, Beijing, 100190, China 4.School of Fundamental Physics and Mathematical Sciences, Hangzhou Institute for Advanced Study, University of Chinese Academy of sciences, 1 Xiangshan Branch Alley, Hangzhou, 310024, China
推荐引用方式 GB/T 7714	Jin X,Wang C,Shen J,et al. Linear off null working condition for total internal reflection imaging ellipsometry to detect subtle electron density change[C]. 见:. Hangzhou. 24 April 2021 到 26 April 2021.