Subdiffraction nanofocusing of circularly polarized light with a plasmonic cavity lens

doi:10.1039/c9tc00499h

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 微细加工光学技术国家重点实验室（开放室）

	Subdiffraction nanofocusing of circularly polarized light with a plasmonic cavity lens
	Luo, Yunfei 1,2; Kong, Weijie 1,2; Zhao, Chengwei 1,2; Liu, Kaipeng 2; Pu, Mingbo 1,2; Wang, Changtao 1,2; Luo, Xiangang 1,2
刊名	Journal of Materials Chemistry C
	2019-05-21
卷号	7 期号:19 页码:5615-5623
ISSN号	2050-7526
DOI	10.1039/c9tc00499h
文献子类	期刊论文
英文摘要	Nanofocusing beyond the diffraction limit has received a significant amount of attention in recent years due to its versatility. In this paper, subdiffraction nanofocusing of circularly polarized light is achieved in a plasmonic cavity lens by constructive interference of plasmonic waveguide modes launched by a spiral slot. By employing a plasmonic cavity lens composed of a metal-insulator-metal (MIM) waveguide, the plasmonic mode wavelength could be suppressed efficiently and thus a deep subwavelength focal spot could be attained. Simulated and lithography experimental results indicate that a focal spot with 60 nm size and 30 nm depth of focus could be produced in a photoresist under laser illumination with 375 nm wavelength. Moreover, the plasmonic cavity lens could tolerate a maximum air gap between the mask and the lens of 40 nm, which facilitates practical applications. Additionally, defocusing would happen for a spiral slot with opposite chirality. This design provides a simple solution for deep subwavelength light confinement and may find applications in nanolithography, super resolution imaging, high density data storage, etc. © The Royal Society of Chemistry 2019.
WOS关键词	2-PHOTON POLYMERIZATION ; HYBRID MATERIALS ; FABRICATION
WOS研究方向	Materials Science, Multidisciplinary ; Physics, Applied
语种	英语
出版者	Royal Society of Chemistry
WOS记录号	WOS:000472444000005
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/9728]
专题	光电技术研究所_微细加工光学技术国家重点实验室（开放室）
作者单位	1.University of Chinese Academy of Sciences, Beijing; 100049, China 2.State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Science, P. O. Box 350, Chengdu; 610209, China;
推荐引用方式 GB/T 7714	Luo, Yunfei,Kong, Weijie,Zhao, Chengwei,et al. Subdiffraction nanofocusing of circularly polarized light with a plasmonic cavity lens[J]. Journal of Materials Chemistry C,2019,7(19):5615-5623.
APA	Luo, Yunfei.,Kong, Weijie.,Zhao, Chengwei.,Liu, Kaipeng.,Pu, Mingbo.,...&Luo, Xiangang.(2019).Subdiffraction nanofocusing of circularly polarized light with a plasmonic cavity lens.Journal of Materials Chemistry C,7(19),5615-5623.
MLA	Luo, Yunfei,et al."Subdiffraction nanofocusing of circularly polarized light with a plasmonic cavity lens".Journal of Materials Chemistry C 7.19(2019):5615-5623.