(100) oriented diamond film prepared on amorphous carbon buffer layer containing nano-crystalline diamond grains

doi:10.1016/j.surfcoat.2020.125368

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	(100) oriented diamond film prepared on amorphous carbon buffer layer containing nano-crystalline diamond grains
	Lu, Yunxiang ; Man, Weidong ; Wang, Bo ; Rosenkranz, Andreas ; Yang, Mingyang ; Yang, Ke ; Yi, Jian ; Song, Hui ; Li, He ; Jiang, Nan
刊名	SURFACE & COATINGS TECHNOLOGY
	2020
卷号	385
关键词	HOT-FILAMENT CVD ELECTRICAL-PROPERTIES GROWTH MORPHOLOGY BEHAVIOR SILICON NUCLEATION TEXTURE QUALITY MPCVD
DOI	10.1016/j.surfcoat.2020.125368
英文摘要	In this study, amorphous carbon buffer layer containing nano-crystalline diamond grains was pre-deposited on single crystal silicon (Si) wafers. (100) oriented diamond films were prepared on the buffer layer by increasing deposition temperature. Morphology observation demonstrated that (100) oriented diamond plates appear on the buffer layer, thus realizing the deposition of (100) oriented diamond film. Transmission electron microscopy confirmed that (100) oriented diamond dominates deposition at high temperatures, leading to the formation of the (100) oriented diamond plates. The fast lateral growth of nano-crystalline diamond grains with (100) orientation in the buffer layer is the main driving force for the deposition of (100) oriented diamond film, providing a new route for the preparation of (100) oriented diamond films.
学科主题	Materials Science ; Physics
内容类型	期刊论文
源URL	[http://ir.nimte.ac.cn/handle/174433/19871]
专题	2020专题
作者单位	1.Man, WD (corresponding author), Wuhan Inst Technol, Prov Key Lab Plasma Chem & Adv Mat, Wuhan 430073, Peoples R China. 2.Wang, B (corresponding author), Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Key Lab Marine New Mat & Related Technol, Zhejiang Key Lab Marine Mat & Protect Technol, Ningbo 315201, Peoples R China.
推荐引用方式 GB/T 7714	Lu, Yunxiang,Man, Weidong,Wang, Bo,et al. (100) oriented diamond film prepared on amorphous carbon buffer layer containing nano-crystalline diamond grains[J]. SURFACE & COATINGS TECHNOLOGY,2020,385.
APA	Lu, Yunxiang.,Man, Weidong.,Wang, Bo.,Rosenkranz, Andreas.,Yang, Mingyang.,...&Jiang, Nan.(2020).(100) oriented diamond film prepared on amorphous carbon buffer layer containing nano-crystalline diamond grains.SURFACE & COATINGS TECHNOLOGY,385.
MLA	Lu, Yunxiang,et al."(100) oriented diamond film prepared on amorphous carbon buffer layer containing nano-crystalline diamond grains".SURFACE & COATINGS TECHNOLOGY 385(2020).