Modified snapshot spectroscopic ellipsometry based on optical frequency-domain interferometry | |
Li, Siyuan3,4; Zhang, Chunmin2; Quan, Naicheng1,4 | |
刊名 | Optik |
2021-02 | |
卷号 | 228 |
关键词 | Spectroscopic ellipsometry Optical frequency-domain interferometry Channel bandwidth |
ISSN号 | 00304026 |
DOI | 10.1016/j.ijleo.2020.166165 |
产权排序 | 1 |
英文摘要 | We propose a modified snapshot spectroscopic ellipsometry based on optical frequency-domain interferometry. The proposed system employs only one high-order retarder and a Wollaston prism to analyze the changed state of polarization of the reflected light and can provide the maximum channel bandwidth of the channeled spectroscopic ellipsometry. The spectroscopic ellipsometric parameters of isotropic samples can be accurately measured in a measurement speed of 40 ms without mechanical or active modulation devices. The feasibility of the proposed spectroscopic ellipsometry is demonstrated by experiments. © 2020 |
语种 | 英语 |
出版者 | Elsevier GmbH |
WOS记录号 | WOS:000615935900011 |
内容类型 | 期刊论文 |
源URL | [http://ir.opt.ac.cn/handle/181661/94244] |
专题 | 西安光学精密机械研究所_光学影像学习与分析中心 |
通讯作者 | Li, Siyuan |
作者单位 | 1.School of Materials Science and Engineering, Xi'an University of Technology, Xi'an, China 2.Xi'an Jiaotong University, Xi'an, China; 3.University of Chinese Academy of Sciences, Beijing, China; 4.Chinese Academy of Sciences, Xi'an Institute of Optics and Precision Mechanics, Key Laboratory of Spectral Imaging Technology CAS, Xi'an, China; |
推荐引用方式 GB/T 7714 | Li, Siyuan,Zhang, Chunmin,Quan, Naicheng. Modified snapshot spectroscopic ellipsometry based on optical frequency-domain interferometry[J]. Optik,2021,228. |
APA | Li, Siyuan,Zhang, Chunmin,&Quan, Naicheng.(2021).Modified snapshot spectroscopic ellipsometry based on optical frequency-domain interferometry.Optik,228. |
MLA | Li, Siyuan,et al."Modified snapshot spectroscopic ellipsometry based on optical frequency-domain interferometry".Optik 228(2021). |
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