Modified snapshot spectroscopic ellipsometry based on optical frequency-domain interferometry
Li, Siyuan3,4; Zhang, Chunmin2; Quan, Naicheng1,4
刊名Optik
2021-02
卷号228
关键词Spectroscopic ellipsometry Optical frequency-domain interferometry Channel bandwidth
ISSN号00304026
DOI10.1016/j.ijleo.2020.166165
产权排序1
英文摘要

We propose a modified snapshot spectroscopic ellipsometry based on optical frequency-domain interferometry. The proposed system employs only one high-order retarder and a Wollaston prism to analyze the changed state of polarization of the reflected light and can provide the maximum channel bandwidth of the channeled spectroscopic ellipsometry. The spectroscopic ellipsometric parameters of isotropic samples can be accurately measured in a measurement speed of 40 ms without mechanical or active modulation devices. The feasibility of the proposed spectroscopic ellipsometry is demonstrated by experiments. © 2020

语种英语
出版者Elsevier GmbH
WOS记录号WOS:000615935900011
内容类型期刊论文
源URL[http://ir.opt.ac.cn/handle/181661/94244]  
专题西安光学精密机械研究所_光学影像学习与分析中心
通讯作者Li, Siyuan
作者单位1.School of Materials Science and Engineering, Xi'an University of Technology, Xi'an, China
2.Xi'an Jiaotong University, Xi'an, China;
3.University of Chinese Academy of Sciences, Beijing, China;
4.Chinese Academy of Sciences, Xi'an Institute of Optics and Precision Mechanics, Key Laboratory of Spectral Imaging Technology CAS, Xi'an, China;
推荐引用方式
GB/T 7714
Li, Siyuan,Zhang, Chunmin,Quan, Naicheng. Modified snapshot spectroscopic ellipsometry based on optical frequency-domain interferometry[J]. Optik,2021,228.
APA Li, Siyuan,Zhang, Chunmin,&Quan, Naicheng.(2021).Modified snapshot spectroscopic ellipsometry based on optical frequency-domain interferometry.Optik,228.
MLA Li, Siyuan,et al."Modified snapshot spectroscopic ellipsometry based on optical frequency-domain interferometry".Optik 228(2021).
个性服务
查看访问统计
相关权益政策
暂无数据
收藏/分享
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。


©版权所有 ©2017 CSpace - Powered by CSpace