Large diameter optics support optimization based on finite element method and optical surface fitting with zernike method

doi:10.1117/12.2574631

CORC > 西安光学精密机械研究所 > 中国科学院西安光学精密机械研究所 > 动态光学成像研究室

	Large diameter optics support optimization based on finite element method and optical surface fitting with zernike method
	Liang-Xiao, Zhao 1,2; Jian, Zhang 1,3; San-Feng, Hao 1,2; Li-Min, Gao 1
	2020
会议日期	2020-06-29
会议地点	Shanghai, China
关键词	Large diameter optics mirror Support optimization Finite element method Optical surface fitting
卷号	11568
DOI	10.1117/12.2574631
英文摘要	Large aperture optical element deformed by its own weight is caused is one of the important considerations when we design the optical system, designing a mirror support solution that reduces the effects of gravity is critical.Traditional methods cannot effectively and intuitively analyze mirror distortion.In this paper, the finite element method and the optical surface fitting with zernike polynomial are used to optimize the support scheme. These two methods are mutually verified and this method which use two parts is verified by the optimization scheme of the Φ900mm standard spherical mirror.With optimization, the steel belt loading and unloading weight hammer support scheme is finally adopted, and the best solution with Φ705mmin the circumference and each aperture is 55mm on the back of the mirror is obtained. The theoretical mirror surface's PV and RMS value equal to7.36nm (1/86λ) and 1.64nm (1/386λ), which is a good basis for guiding production. © 2020 SPIE. All rights reserved.
产权排序	1
会议录	AOPC 2020: Optics Ultra Precision Manufacturing and Testing
会议录出版者	SPIE
语种	英语
ISSN号	0277786X;1996756X
ISBN号	9781510639577
WOS记录号	WOS:000616198900003
内容类型	会议论文
源URL	[http://ir.opt.ac.cn/handle/181661/94433]
专题	西安光学精密机械研究所_动态光学成像研究室
作者单位	1.Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Science, Xi'an; 710119, China; 2.University of Chinese Academy of Science, Beijing; 100049, China; 3.Xidian University, Xi'an; 710126, China
推荐引用方式 GB/T 7714	Liang-Xiao, Zhao,Jian, Zhang,San-Feng, Hao,et al. Large diameter optics support optimization based on finite element method and optical surface fitting with zernike method[C]. 见:. Shanghai, China. 2020-06-29.