Dominant Loss Mechanisms of Whispering Gallery Mode RF-MEMS Resonators with Wide Frequency Coverage

	Dominant Loss Mechanisms of Whispering Gallery Mode RF-MEMS Resonators with Wide Frequency Coverage
	Chen, Zeji; Jia, Qianqian; Liu, Wenli; Yuan, Quan; Zhu, Yinfang; Yang, Jinling; Yang, Fuhua
刊名	Sensors
	2020
卷号	20 期号:24 页码:7017
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/29979]
专题	半导体研究所_半导体集成技术工程研究中心
推荐引用方式 GB/T 7714	Chen, Zeji;Jia, Qianqian;Liu, Wenli;Yuan, Quan;Zhu, Yinfang;Yang, Jinling;Yang, Fuhua. Dominant Loss Mechanisms of Whispering Gallery Mode RF-MEMS Resonators with Wide Frequency Coverage[J]. Sensors,2020,20(24):7017.
APA	Chen, Zeji;Jia, Qianqian;Liu, Wenli;Yuan, Quan;Zhu, Yinfang;Yang, Jinling;Yang, Fuhua.(2020).Dominant Loss Mechanisms of Whispering Gallery Mode RF-MEMS Resonators with Wide Frequency Coverage.Sensors,20(24),7017.
MLA	Chen, Zeji;Jia, Qianqian;Liu, Wenli;Yuan, Quan;Zhu, Yinfang;Yang, Jinling;Yang, Fuhua."Dominant Loss Mechanisms of Whispering Gallery Mode RF-MEMS Resonators with Wide Frequency Coverage".Sensors 20.24(2020):7017.