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	Method of manufacturing frequency tunable terahertz transceiver
	PARK, KYUNG, HYUN
	2016-01-12
著作权人	ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
专利号	US9236711
国家	美国
文献子类	授权发明
其他题名	Method of manufacturing frequency tunable terahertz transceiver
英文摘要	A method of manufacturing a frequency tunable terahertz transceiver including two separate distributed feedback lasers manufactured in one substrate, includes forming a lower clad layer on the substrate, forming an active layer on the lower clad layer, forming an upper clad layer on the active layer. And interposing first and second diffraction grating layers between the upper clad layers. A diffraction grating is manufactured by etching the first and second diffraction grating layers. The active layer is integrated into a passive waveguide. An electrode is formed on the upper clad layer.
公开日期	2016-01-12
申请日期	2014-02-10
状态	授权
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/42104]
专题	半导体激光器专利数据库
作者单位	ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
推荐引用方式 GB/T 7714	PARK, KYUNG, HYUN. Method of manufacturing frequency tunable terahertz transceiver. US9236711. 2016-01-12.

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