Orientation fluctuation trend of Pt and ZnO layers in film bulk acoustic resonator

	Orientation fluctuation trend of Pt and ZnO layers in film bulk acoustic resonator
	Yan, Z ; Yi, M ; Song, ZT ; Liu, WL ; Ji, H ; Feng, SL
刊名	PHYSICA B-CONDENSED MATTER
	2007
卷号	400 期号:1-2 页码:38-41
关键词	WAVE RESONATORS THIN-FILMS DEPOSITION TECHNOLOGY FILTERS GROWTH
ISSN号	0921-4526
通讯作者	Yan, Z, Shanghai Univ Engn Sci, Mat Engn Coll, Shanghai 201600, Peoples R China
学科主题	Physics, Condensed Matter
收录类别	SCI
语种	英语
公开日期	2012-03-24
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/95149]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Yan, Z,Yi, M,Song, ZT,et al. Orientation fluctuation trend of Pt and ZnO layers in film bulk acoustic resonator[J]. PHYSICA B-CONDENSED MATTER,2007,400(1-2):38-41.
APA	Yan, Z,Yi, M,Song, ZT,Liu, WL,Ji, H,&Feng, SL.(2007).Orientation fluctuation trend of Pt and ZnO layers in film bulk acoustic resonator.PHYSICA B-CONDENSED MATTER,400(1-2),38-41.
MLA	Yan, Z,et al."Orientation fluctuation trend of Pt and ZnO layers in film bulk acoustic resonator".PHYSICA B-CONDENSED MATTER 400.1-2(2007):38-41.