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	Design and Simulation of Corrugated Diaphragm Applied to the MEMS Fiber Optic Pressure Sensor
	Gui, Yiming ; Zhang, Yangxi ; Liu, Guandong ; Hao, Yilong ; Gao, Chengchen
	2016
关键词	MEMS corrugated diaphragm sensitivity FABRICATION
英文摘要	In this paper, we propose a corrugated diaphragm applied to the fiber optic pressure sensor which needs a wide sensing range and a large deflection. The corrugated diaphragm can effectively improve the sensitivity of the sensor has been proved by ANSYS simulation. The stress concentration is weakened after the silicon is chamfered into corrugated diaphragm by isotropic etching process. The sensitivity of the corrugated diaphragm can reach to 0.44 mu m/MPa which is two times larger than that of the same size planar diaphragm. The maximum sensing stress is up to 14MPa.; CPCI-S(ISTP); gaocc@pku.edu.cn
语种	英语
出处	11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/459752]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Gui, Yiming,Zhang, Yangxi,Liu, Guandong,et al. Design and Simulation of Corrugated Diaphragm Applied to the MEMS Fiber Optic Pressure Sensor. 2016-01-01.

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