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	A novel shock protection method based on MEMS compliant latching stopper
	Xu, Kaisi ; Zhu, Ningli ; Zhang, Xianfeng ; Su, Weiguo ; Zhang, Wei ; Hao, Yilong
	2016
英文摘要	This paper reports a novel shock protector on the basis of compliant latching system for the shock resistance enhancement of microelectromechanical systems (MEMS) devices applied in high shock environment. For the first time, MEMS latches have been employed to dissipate energy during impact. Through the machine logic, the MEMS latches have realized different shock protection functions upon relative impact amplitudes to reduce the impact force applied on microstructures. In this work, the compliant latching stopper has been verified to provide multi-fold shock resistance improvement compared with some traditional shock protection structure such as hard stopper and compliant spring stopper. ? 2016 IEEE.; EI; 1125-1128; 2016-February
语种	英语
出处	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
DOI标识	10.1109/MEMSYS.2016.7421833
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/436250]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Xu, Kaisi,Zhu, Ningli,Zhang, Xianfeng,et al. A novel shock protection method based on MEMS compliant latching stopper. 2016-01-01.

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