Fabrication of Random Microwell Arrays as Pseudo-Thermal Speckle Light Source

doi:10.3390/mi9060256

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 微电子装备总体研究室（四室）

	Fabrication of Random Microwell Arrays as Pseudo-Thermal Speckle Light Source
	Cao, Axiu 1,2; Pang, Hui 1; Wang, Jiazhou 1,2; Shi, Lifang 1; Deng, Qiling 1; Hu, Song 1
刊名	MICROMACHINES
	2018-06-01
卷号	9 期号:6 页码:256
关键词	microfabrication microwell arrays speckle light source pseudo-thermal source
ISSN号	2072-666X
DOI	10.3390/mi9060256
文献子类	J
英文摘要	Quantum correlated imaging using the intensity fluctuations of thermal light possesses advantages of high resolution and strong anti-interference ability. The common method to produce pseudo-thermal light source is using a rotary ground glass and transmission of laser beam. In the present work, we propose a method for the fabrication of microwell arrays with randomly varied diameters, which could be used as a new structural element for pseudo-thermal speckle light source. If these are etched with random sizes then they may also have random and complex varying curvatures (diffusion limited etching) leading to random destructive interference of the coherent beam which could be a good thing. The microwell arrays, with diameters randomly varying from 5 m to 40 m, height varying from 200 nm to 20 m, were fabricated by photolithography combined with acid etching. The experimental conditions are simple and can be scaled up to for large structures. The produced microwell arrays can transform the laser beam to a pseudo-thermal light source with a certain divergent angle by rational designing of mask and adjustable process parameters.
WOS关键词	IMAGE
语种	英语
WOS记录号	WOS:000436506300002
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/9312]
专题	光电技术研究所_微电子装备总体研究室（四室）
作者单位	1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China; 2.University of Chinese Academy of Sciences, Beijing; 100049, China
推荐引用方式 GB/T 7714	Cao, Axiu,Pang, Hui,Wang, Jiazhou,et al. Fabrication of Random Microwell Arrays as Pseudo-Thermal Speckle Light Source[J]. MICROMACHINES,2018,9(6):256.
APA	Cao, Axiu,Pang, Hui,Wang, Jiazhou,Shi, Lifang,Deng, Qiling,&Hu, Song.(2018).Fabrication of Random Microwell Arrays as Pseudo-Thermal Speckle Light Source.MICROMACHINES,9(6),256.
MLA	Cao, Axiu,et al."Fabrication of Random Microwell Arrays as Pseudo-Thermal Speckle Light Source".MICROMACHINES 9.6(2018):256.