Design and characterization of an inertial microswitch with synchronous follow-up flexible compliant electrodes capable of extending contact duration.

	Design and characterization of an inertial microswitch with synchronous follow-up flexible compliant electrodes capable of extending contact duration.
	Ding, Guifu; Zhao, Xiaolin; Yang, Zhuoqing; Xu, Qiu; Sun, Bin; Li, Yigui; Xiang, Xiaojian; Lai, Liyan; Li, Jian
刊名	SENSORS AND ACTUATORS A-PHYSICAL
	2018
文献子类	期刊论文
英文摘要	An inertial microswitch with synchronous follow-up compliant electrodes for extending the contact duration is proposed in this paper. A flexible movable electrode and a stationary electrode in the double-stair and spring-shape structures are used for not only extending contact duration but also reducing the impact bounces. The simulated contact time can reach 350 mu s under 500 g applied acceleration, which indicates there is a better contact effect than that reported elsewhere. The fabricated inertial microswitch based on surface micromachining technology was characterized by the dropping hammer system. No contact bouncing behavior can be observed under the acceleration amplitude 466 g and the test contact duration can reach 390 mu s, longer than the microwitch with only one flexible electrode. The testing comparison of the microswitches with and without constraint structure indicates that the contact-bouncing behavior is easier to happen if without constraint structure, which indicates that the designed constraint structure can restrain the vibration of the proof mass in z-off-axis sensitive direction and effectively improve the stability of the device. The test results have an agreement with the simulated ones.
URL标识	查看原文
语种	英语
内容类型	期刊论文
源URL	[http://ir.siat.ac.cn:8080/handle/172644/14821]
专题	深圳先进技术研究院_其他
推荐引用方式 GB/T 7714	Ding, Guifu,Zhao, Xiaolin,Yang, Zhuoqing,et al. Design and characterization of an inertial microswitch with synchronous follow-up flexible compliant electrodes capable of extending contact duration.[J]. SENSORS AND ACTUATORS A-PHYSICAL,2018.
APA	Ding, Guifu.,Zhao, Xiaolin.,Yang, Zhuoqing.,Xu, Qiu.,Sun, Bin.,...&Li, Jian.(2018).Design and characterization of an inertial microswitch with synchronous follow-up flexible compliant electrodes capable of extending contact duration..SENSORS AND ACTUATORS A-PHYSICAL.
MLA	Ding, Guifu,et al."Design and characterization of an inertial microswitch with synchronous follow-up flexible compliant electrodes capable of extending contact duration.".SENSORS AND ACTUATORS A-PHYSICAL (2018).