Band alignment of In2O3/beta-Ga2O3 interface determined by X-ray photoelectron spectroscopy

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	Band alignment of In2O3/beta-Ga2O3 interface determined by X-ray photoelectron spectroscopy
	Wu, Su-Dong; Zhang, David Wei; Ding, Shi-Jin; Sun, Qing-Qing; Xia, Chang-Tai; Horng, Ray-Hua; Yu, Wen-Jie; Zhu, Bao; Ma, Gan; Huan, Ya-Wei
刊名	APPLIED PHYSICS LETTERS
	2018
卷号	113 期号:3
关键词	In2o3 Indium Films Heterostructures Temperature Valence Offsets Gap
英文摘要	The energy band alignment of the atomic-layer-deposited In2O3/beta-Ga2O3((2) over bar 10) interface is evaluated by X-ray photoelectron spectroscopy. The X-ray diffraction pattern reveals that the In2O3 film grown at 160 degrees C is amorphous, while it becomes polycrystalline at a higher deposition temperature of 200 degrees C. The bandgaps, determined by reflection electron energy loss spectroscopy, are 4.65, 3.85, and 3.47 eV for beta-Ga2O3, polycrystalline In2O3, and amorphous In2O3, respectively. Both amorphous and polycrystalline In2O3/beta-Ga2O3 interfaces have Type I alignment. The conduction and valence band offsets at the polycrystalline (amorphous) In2O3/beta-Ga2O3 interface are 0.35 and 0.45 eV (0.39 and 0.79 eV), respectively. These observations suggest that polycrystalline In2O3 as an intermediate semiconductor layer is beneficial to the barrier reduction of metal/Ga2O3 contact. Published by AIP Publishing.
学科主题	Chemistry ; Energy & Fuels ; Materials Science
语种	英语
公开日期	2018-12-04
内容类型	期刊论文
源URL	[http://ir.nimte.ac.cn/handle/174433/17308]
专题	2018专题
推荐引用方式 GB/T 7714	Wu, Su-Dong,Zhang, David Wei,Ding, Shi-Jin,et al. Band alignment of In2O3/beta-Ga2O3 interface determined by X-ray photoelectron spectroscopy[J]. APPLIED PHYSICS LETTERS,2018,113(3).
APA	Wu, Su-Dong.,Zhang, David Wei.,Ding, Shi-Jin.,Sun, Qing-Qing.,Xia, Chang-Tai.,...&Sun, Shun-Ming.(2018).Band alignment of In2O3/beta-Ga2O3 interface determined by X-ray photoelectron spectroscopy.APPLIED PHYSICS LETTERS,113(3).
MLA	Wu, Su-Dong,et al."Band alignment of In2O3/beta-Ga2O3 interface determined by X-ray photoelectron spectroscopy".APPLIED PHYSICS LETTERS 113.3(2018).