Microstructuring of anti-reflection film for HgCdTe/Si IRFPA with femtosecond laser pulse

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 强场激光物理国家重点实验室

	Microstructuring of anti-reflection film for HgCdTe/Si IRFPA with femtosecond laser pulse
	Zhang, Shan ; Hu, Xiaoning ; Liao, Yang ; He, Fei ; Liu, Changning ; Cheng, Ya
刊名	chin. opt. lett.
	2013
卷号	11 期号:3 页码:33101
通讯作者	zhang, s (reprint author), chinese acad sci, shanghai inst tech phys, key lab infrared imaging mat & detectors, shanghai 200083, peoples r china.
英文摘要	a systematic series of silicon (si) wafer with microstructured anti-reflection film is prepared by femtosecond laser pulse. the dependence of the morphology and optical properties of the microstructured si on the experimental parameters is thoroughly investigated. with the laser pulse duration of 40 fs, central wavelength of 800 nm, repetition rate of 250 khz, laser pulse power of 300 mw, 250 mu m/s scanning speed, and 2 mu m of displacement between the parallel scans in the air, the quasiordered arrays of grain microstructures on the si wafer up to 800-nm tall and 800-nm diameter at the bottom offered near-unity transmission in the mid-infrared wavelength. an anti-reflection film of approximately 3 x 3 (mm) is developed on the (211) si substrate with the optimized parameters, moreover, up to 30% improvement of the response performance is demonstrated.
收录类别	SCI
语种	英语
内容类型	期刊论文
版本	出版稿
源URL	[http://ir.siom.ac.cn/handle/181231/14976]
专题	上海光学精密机械研究所_强场激光物理国家重点实验室
作者单位	1.[Zhang, Shan 2.Hu, Xiaoning] Chinese Acad Sci, Shanghai Inst Tech Phys, Key Lab Infrared Imaging Mat & Detectors, Shanghai 200083, Peoples R China 3.[Liao, Yang 4.He, Fei 5.Liu, Changning 6.Cheng, Ya] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China
推荐引用方式 GB/T 7714	Zhang, Shan,Hu, Xiaoning,Liao, Yang,et al. Microstructuring of anti-reflection film for HgCdTe/Si IRFPA with femtosecond laser pulse[J]. chin. opt. lett.,2013,11(3):33101.
APA	Zhang, Shan,Hu, Xiaoning,Liao, Yang,He, Fei,Liu, Changning,&Cheng, Ya.(2013).Microstructuring of anti-reflection film for HgCdTe/Si IRFPA with femtosecond laser pulse.chin. opt. lett.,11(3),33101.
MLA	Zhang, Shan,et al."Microstructuring of anti-reflection film for HgCdTe/Si IRFPA with femtosecond laser pulse".chin. opt. lett. 11.3(2013):33101.