Microwave loss of DC sputtered NbTiN microstrip lines

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	Microwave loss of DC sputtered NbTiN microstrip lines
	Shan, Wenlei 1; Sekimoto, Yutaro 2; Noguchi, Takashi 2
刊名	JAPANESE JOURNAL OF APPLIED PHYSICS
	2015-09-01
卷号	54 期号:9 页码:90303
英文摘要	Amorphous NbTiN is widely applied in superconducting electronic devices owing to its merits of wide energy gap, high Tc, and mitigated requirement in fabrication. Its highly disordered feature yields considerable kinetic inductance, making it an ideal material for parametric amplification. To build up the correspondence between the fabrication conditions and the desirable electrical performance, we designed, fabricated, and measured NbTiN microstrip resonators at microwave frequencies. The principal result is that the unloaded Q factor of the resonators does not depend on the film normal state resistivity, which largely depends on the sputtering pressure. This result is consistent with the dirty superconductor theories. (C) 2015 The Japan Society of Applied Physics
学科主题	天文和天体物理
WOS标题词	Science & Technology ; Physical Sciences
类目[WOS]	Physics, Applied
研究领域[WOS]	Physics
关键词[WOS]	FILMS
收录类别	SCI
语种	英语
WOS记录号	WOS:000362024900003
内容类型	期刊论文
源URL	[http://libir.pmo.ac.cn/handle/332002/14803]
专题	紫金山天文台_毫米波和亚毫米波技术实验室
作者单位	1.Chinese Acad Sci, Purple Mt Observ, Nanjing 210008, Jiangsu, Peoples R China 2.Natl Astron Observ Japan, Mitaka, Tokyo 1818588, Japan
推荐引用方式 GB/T 7714	Shan, Wenlei,Sekimoto, Yutaro,Noguchi, Takashi. Microwave loss of DC sputtered NbTiN microstrip lines[J]. JAPANESE JOURNAL OF APPLIED PHYSICS,2015,54(9):90303.
APA	Shan, Wenlei,Sekimoto, Yutaro,&Noguchi, Takashi.(2015).Microwave loss of DC sputtered NbTiN microstrip lines.JAPANESE JOURNAL OF APPLIED PHYSICS,54(9),90303.
MLA	Shan, Wenlei,et al."Microwave loss of DC sputtered NbTiN microstrip lines".JAPANESE JOURNAL OF APPLIED PHYSICS 54.9(2015):90303.